au.\*:("SCHONHARDT, S")
Results 1 to 1 of 1
Selection :
Modular Integration of Microactuators and Micro-Optical BenchesSCHÜLE, S; HOLLENBACH, U; MONT, J et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 699202.1-699202.12, issn 0277-786X, isbn 978-0-8194-7190-1Conference Paper
